Exposure method and apparatus including focus control

Details Exposure method and apparatus including focus control Exposure method and apparatus including focus control

1998-02-04

1999-08-10

Metjahic, Safet

Photocopying

Projection printing and copying cameras

Focus or magnification control

355 53, 355 77, 356401, G03B 2742, G03B 2752, G03B 2732, G01B 1100

Patent

active

059367121

ABSTRACT:
To improve the focus accuracy during alignment and to improve the alignment accuracy even if a substrate has warpage, during alignment, an approximate focus plane is obtained by using only the detection results at focus points of focus sensors located near the ends of a substrate, close to alignment points, and without using the detection results at focus points of two central focus sensors. The auto-focus operation is performed by using the above operation results. As a result, a substrate is driven so as to be adjusted to the approximate focus plane during alignment.

REFERENCES:
patent: 5657130 (1997-08-01), Shirasu et al.

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