Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Patent
1991-10-04
1993-10-05
Nelms, David C.
Radiant energy
Photocells; circuits and apparatus
Photocell controls its own optical systems
250548, 355 68, G01J 132
Patent
active
052507971
ABSTRACT:
A semiconductor device manufacturing exposure method usable with a pulsed light source is disclosed. The light source is caused to produce pulses of light in accordance with successively changed control parameters, while a sensor detects each pulse of light from the light source. Outputs of the sensor corresponding to the pulses of light are integrated to determine a quantity of exposure of a predetermined zone of a substrate corresponding to each light pulse. By using the determined exposure quantities corresponding to the pulses of light, a relational equation representing the relationship between each control parameter and a corresponding exposure quantity is determined. Then, a control parameter for subsequent light pulse emission of the light source is determined in accordance with the determined relational equation.
REFERENCES:
patent: 4785192 (1988-11-01), Bruning
patent: 5028797 (1991-07-01), Abe et al.
patent: 5053614 (1991-10-01), Yui et al.
patent: 5134273 (1992-07-01), Wani et al.
Asahina Tsutomu
Sano Naoto
Allen Stephone
Canon Kabushiki Kaisha
Nelms David C.
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