Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2005-10-11
2008-11-04
Lee, Diane I. (Department: 2851)
Photocopying
Projection printing and copying cameras
Illumination systems or details
Reexamination Certificate
active
07446858
ABSTRACT:
An exposure method and apparatus simultaneously transfer patterns with various pitches with high resolution. On the pupil surface of an illumination system, nine areas are set. The nine areas are a first area including the optical axis, four second areas each smaller than the first area and arranged along a first circumference surrounding the first area, and four third areas each smaller than the first area and arranged along a second circumference surrounding the first circumference and arranged along a second circumference. The distribution of intensity of light over the pupil surface is so set that the intensities of light over the nine areas are approximately equal to one another, and the intensity of light over the other area is smaller than those over the nine areas. This distribution of intensity of light is set using a diffraction optical element or a diaphragm.
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Hirukawa Shigeru
Kudo Takehito
Lee Diane I.
Liu Chia-how Michael
Nikon Corporation
Oliff & Berridg,e PLC
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