Exposure method and apparatus, and device producing method...

Details Exposure method and apparatus, and device producing method... Exposure method and apparatus, and device producing method...

2006-02-28

2010-10-19

Kim, Peter B (Department: 2882)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S030000

Reexamination Certificate

active

07817249

ABSTRACT:
An exposure method which includes illuminating a first object formed with a pattern to be transferred with a first light beam to expose a second object with the first light beam through the first object and a projection optical system; and irradiating the first object and at least one portion of the projection optical system with a second light beam having a wavelength range that is different from that of the first light beam to correct image forming characteristics of the projection optical system.

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