Exposure method and apparatus and device produced thereby in whi

Details Exposure method and apparatus and device produced thereby in whi Exposure method and apparatus and device produced thereby in whi

1995-05-19

1997-08-26

Braun, Fred L.

Photocopying

Projection printing and copying cameras

Step and repeat

355 71, G03B 2742

Patent

active

056615477

ABSTRACT:
An exposure apparatus includes a supplying device for supplying a band-narrowed laser beam, an optical system for directing the laser beam to a substrate, a detecting device for detecting a change in bandwidth of the laser beam and a stop provided on a path of the laser beam, the stop including an opening having a size which is variable to substantially compensate for the change in bandwidth of the laser beam. Also, a device is manufactured by a method of exposing a photosensitive layer of a substrate through an optical system with a band-narrowed laser beam to print a circuit pattern on the photosensitive layer, in which a bandwidth of the laser beam is substantially compensated for, upon detecting a change in bandwidth of the laser beam, by adjusting a size of an opening of a stop provided in a path of the laser beam.

REFERENCES:
patent: 4711568 (1987-12-01), Torigoe et al.
patent: 4773750 (1988-09-01), Bruning
patent: 4811055 (1989-03-01), Hirose
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patent: 4905041 (1990-02-01), Aketagawa
patent: 4937619 (1990-06-01), Fukuda et al.
patent: 4968868 (1990-11-01), Aketagawa
patent: 4974919 (1990-12-01), Muraki et al.
patent: 5089913 (1992-02-01), Singh et al.
patent: 5121160 (1992-06-01), Sano et al.
patent: 5386269 (1995-01-01), Kosugi

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