Exposure method and apparatus

Details Exposure method and apparatus Exposure method and apparatus

1993-06-30

1994-07-12

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Step and repeat

355 68, G03B 2742, G03B 2774, G03B 2780

Patent

active

053293363

ABSTRACT:
An exposure apparatus includes

REFERENCES:
patent: 4828392 (1989-05-01), Nomura et al.
patent: 4908656 (1990-03-01), Suwa et al.
patent: 4931830 (1990-06-01), Suwa et al.
patent: 4988188 (1991-01-01), Ohta
patent: 5097291 (1992-03-01), Suzuki
patent: 5160962 (1992-11-01), Miura et al.
Naomasa Shiraishi et al., "New Imaging Technique for 64M-DRAM", SPIE vol. 1674 Optical/Laser Microlithography V (1992), pp. 741-752.

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