Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate
2006-09-12
2006-09-12
Nguyen, Henry Hung (Department: 2851)
Photocopying
Projection printing and copying cameras
Focus or magnification control
C355S053000
Reexamination Certificate
active
07106419
ABSTRACT:
An exposure method for exposing a pattern on a reticle onto plural shots on an object, includes the steps of measuring flatness information of each of the plural shots on the object, identifying a shot as a specific shot among the plural shots, the specific shot having flatness that is measured in the measuring step and outside a predetermined range, obtaining positional information by measuring plural measurement points on the object, the obtaining step obtaining more detailed positional information of the specific shot identified by the identifying step than that of a non-specific shot that is not the specific shot, and controlling at least one of a position and a tilt of the object using the positional information obtained by the obtaining step.
REFERENCES:
patent: 4849901 (1989-07-01), Shimizu
patent: 5365051 (1994-11-01), Suzuki et al.
patent: 5448332 (1995-09-01), Sakakibara et al.
patent: 5525808 (1996-06-01), Irie et al.
patent: 5750294 (1998-05-01), Hasegawa et al.
patent: 5998801 (1999-12-01), Imai
patent: 6426508 (2002-07-01), Kosugi et al.
patent: 6538721 (2003-03-01), Okita et al.
patent: 6975384 (2005-12-01), Ina
patent: 6-283403 (1994-10-01), None
patent: 06-260391 (1994-11-01), None
patent: 9-045609 (1997-02-01), None
Morgan & Finnegan L.L.P.
Nguyen Henry Hung
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