Electric heating – Metal heating – By arc
Patent
1991-12-23
1992-12-15
Paschall, Mark H.
Electric heating
Metal heating
By arc
21912183, 21912162, 21912185, 2504921, 2504922, B23K 2600, G03B 2727
Patent
active
051719657
ABSTRACT:
A method and an apparatus for exposing an object with a pulsed laser beam. The exposure of one shot (one exposure area) is achieved by a plurality of pulse exposures with laser light in a corresponding number of pulses, as the result of which any fluctuations or errors in the outputs of the pulses are substantially compensated so that correct exposure of each shot is assured. In another aspect, the amounts of exposures by the plural pulses for the one shot exposure are integrated and the integrated amount of exposure is compared with a correct or desired amount of exposure. On the basis of the result of comparison, an additional pulse exposure is effected in accordance with the degree of under exposure.
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Echizen Hiroshi
Suzuki Akiyoshi
Canon Kabushiki Kaisha
Paschall Mark H.
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