Exposure method

Details Exposure method Exposure method

2006-03-07

2006-03-07

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C355S071000, C355S077000

Reexamination Certificate

active

07009686

ABSTRACT:
An exposure method includes the steps of illuminating a pattern formed on a mask using an illumination system that forms an effective light source having a first part that includes only s-polarized light and a second part that mixes s-polarized light and p-polarized light, and projecting, through a projection optical system, light from the mask onto an object to be exposed.

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