Exposure method

Details Exposure method Exposure method

1994-12-19

1995-09-05

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

Step and repeat

G03B 2742

Patent

active

054483336

ABSTRACT:
An exposure method for aligning a plurality of shot areas arranged on a substrate with predetermined exposure positions on a predetermined coordinate system in turn and transcribing, on the substrate, a pattern formed on a mask through a projection optical system comprises the steps of measuring, on a predetermined coordinate system, coordinates of a plurality of sample shot areas selected from a plurality of shot areas, determining weight coefficients corresponding to the coordinates of the sample shot areas, performing statistical calculation based on the coordinates and the weight coefficients of the measured sample shot areas and determining coordinates of the i-th shot area on the predetermined coordinate system, controlling the movement of the substrate according to the determined coordinates of the i-th shot area to set the i-th shot area at the exposure position, and adjusting the projection magnification of the projection optical system based on a parameter expressing deformation of the shot area among a plurality of parameters obtained by statistical calculation upon determining the coordinates of the shot areas.

REFERENCES:
patent: 4629313 (1986-12-01), Tanimoto
patent: 4666273 (1987-05-01), Shimizu et al.
patent: 4677301 (1987-06-01), Tanimoto et al.
patent: 4780617 (1988-10-01), Umatate et al.
patent: 4833621 (1989-05-01), Umatate
patent: 4871237 (1989-10-01), Anzai et al.
patent: 5117255 (1992-05-01), Shiraishi et al.
patent: 5305222 (1994-04-01), Nakamura

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