Exposure mask device and method for orienting a plurality of...

Details Exposure mask device and method for orienting a plurality of... Exposure mask device and method for orienting a plurality of...

2007-08-21

2007-08-21

Vo, Peter (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S720000, C029S743000, C029S759000, C355S053000, C430S005000, C430S022000

Reexamination Certificate

active

10489528

ABSTRACT:
A method for registering a plurality of substrates that are retained on a workpiece carrier onto an exposure mask for carrying out a photolithography process has the steps of registering and immobilizing the exposure mask onto an alignment panel having precisely fitting passthrough orifices for reception of one substrate for each passthrough orifice and inserting into the passthrough orifices of the alignment panel the substrates that are retained on the workpiece carrier.

REFERENCES:
patent: 4345836 (1982-08-01), Phillips
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patent: 5160959 (1992-11-01), Everett et al.
patent: 5540535 (1996-07-01), Hamuro et al.
patent: 5964397 (1999-10-01), Dautartas
patent: 5996985 (1999-12-01), Balz et al.
patent: 199 34 114 (2001-01-01), None
patent: 36 47 47 (1990-04-01), None
patent: 364747 (1990-04-01), None

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