Exposure device with mechanism for forming alignment marks...

Details Exposure device with mechanism for forming alignment marks... Exposure device with mechanism for forming alignment marks...

2011-06-28

2011-06-28

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

Image transferred from individual documents to film strip

C356S399000

Reexamination Certificate

active

07969553

ABSTRACT:
The present invention relates to an exposure device for transferring circuit patterns of a mask to a roll-film-shaped object. The exposure device includes a supply reel rotation section that is constituted by a supply reel around which the object is wound and that feeds the object by rotating the supply reel, at least one guide roller for guiding the object fed from the supply reel rotation section, an exposure stage on which the circuit patterns are transferred to the object guided by the guide roller, and an alignment mark forming section which forms, on the object, alignment marks that are used to align the mask with the object and which is positioned between the guide roller and the exposure stage.

REFERENCES:
patent: 5021821 (1991-06-01), Suzuki
patent: 5075718 (1991-12-01), Suzuki et al.
patent: 5198857 (1993-03-01), Goto
patent: 5585879 (1996-12-01), Tahara et al.
patent: 6519036 (2003-02-01), Hickman
patent: 6700643 (2004-03-01), Mimura et al.
patent: 990612 (2000-04-01), None
patent: 4-299332 (1992-10-01), None
patent: 6-45406 (1994-02-01), None
patent: 09274530 (1997-10-01), None
patent: 2789539 (1998-08-01), None
Machine translation of JP 6-45406, published Feb. 18, 1994.

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