Exposure device with laser device

Details Exposure device with laser device Exposure device with laser device

2005-09-20

2005-09-20

Fuller, Rodney (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S071000, C359S326000

Reexamination Certificate

active

06947123

ABSTRACT:
An exposure apparatus has a light source comprising a laser device that is small and easy to maintain. The laser device comprises a laser oscillator for generating a single-wavelength laser beam (LB3) within a wavelength range including infrared and visible regions; an optical amplifier (18) for amplifying a laser beam (LB3); and a wavelength converter for converting the amplified laser beam into ultraviolet light using a nonlinear optical crystal. The optical amplifier (18) includes a plurality of stages of optical fiber amplifiers (22, 25) for sequential amplification of the laser beam (LB3), and a narrow-band filter (24A) and an isolator (IS3) arranged between optical fiber amplifiers.

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