Exposure device, exposure method and device manufacturing...

Details Exposure device, exposure method and device manufacturing... Exposure device, exposure method and device manufacturing...

2006-10-03

2006-10-03

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

C355S053000, C355S072000, C355S075000

Reexamination Certificate

active

07116396

ABSTRACT:
An exposure device, where circulating systems and for controlling a temperature varied by the driving of a linear motor are connected to a reticle stage and wafer stage, a controller sets the temperature of refrigerant circulating through the circulating system by driving heater, circulating system is connected to a projection optical system and a controller sets the temperature of refrigerant circulating through a circulating system by driving heater by a feedforward control to control the temperature of the refrigerant circulating through the circulating system.

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patent: 2001/0001248 (2001-05-01), Emoto
patent: 2001/0055102 (2001-12-01), Emoto
patent: A 1-195389 (1989-08-01), None
patent: A 3-2912 (1991-01-01), None
patent: A 10-97977 (1998-04-01), None
patent: A 11-307430 (1999-11-01), None
patent: A 2001-7015 (2001-01-01), None
patent: A 2001-290543 (2001-10-01), None
patent: 1999-0083450 (1999-11-01), None

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