Exposure device

Details Exposure device Exposure device

2008-04-18

2010-06-22

Souw, Bernard E (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S372000, C250S365000, C250S461100, C250S50400H, C378S034000

Reexamination Certificate

active

07741622

ABSTRACT:
The present invention presents an exposure device, which includes an optical source for emitting a UV ray, a lighting system for shaping the UV ray into a collimated light beam, an aperture member for producing rectangular first and second light beams based on the light beam from lighting system by using the first and second rectangular windows, first and second spatial light modulators for spatially modulating the first and second light beams, respectively, and first and second projection lighting systems for guiding the modulated first and second light beams to the object.

REFERENCES:
patent: 5115456 (1992-05-01), Kimura et al.
patent: 7006197 (2006-02-01), Lee
patent: 7622720 (2009-11-01), Nonaka et al.
patent: 2004/0240210 (2004-12-01), Lee
patent: 2008/0237490 (2008-10-01), Lee et al.
patent: 2008/0258069 (2008-10-01), Nonaka et al.
patent: 2008/0267248 (2008-10-01), Lee et al.
patent: 2009/0039292 (2009-02-01), Lee et al.
patent: 2009/0196946 (2009-08-01), Kihara et al.
patent: 2006-113413 (2006-04-01), None
patent: 2006-337475 (2006-12-01), None
patent: 2006-343684 (2006-12-01), None

Affiliated with

Also associated with

Rating

Exposure device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Exposure device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Exposure device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4165416