Exposure device

Details Exposure device Exposure device

2011-04-12

2011-04-12

Mathews, Alan A (Department: 2882)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C359S225100, C359S291000

Reexamination Certificate

active

07924407

ABSTRACT:
The present invention relates to an exposure device for forming circuit patterns onto a surface of an object. The exposure device includes at least one spatial light modulator which includes a plurality of reflection elements being arranged in a matrix fashion, at least one optical source which supplies exposure light to the reflection elements, and a bias voltage controller which applies a first voltage to the reflection elements, thereby setting the reflection elements to a first state and which does not apply a voltage to the reflection elements, thereby setting the reflection elements to a second state. In addition, the exposure light is delivered to the surface of the object in the first state, and the exposure light is not delivered to the surface of the object in the second state.

REFERENCES:
patent: 5933183 (1999-08-01), Enomoto et al.
patent: 6046840 (2000-04-01), Huibers
patent: 6312134 (2001-11-01), Jain et al.
patent: 2007/0291348 (2007-12-01), Ejiri et al.
patent: 2006-113413 (2006-04-01), None
patent: 2006-343684 (2006-12-01), None
English Translation of JP 2006-343684 (dated Dec. 21, 2006).

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