Exposure control method and apparatus compensating for detection

Details Exposure control method and apparatus compensating for detection Exposure control method and apparatus compensating for detection

1990-10-02

1991-10-01

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

355 68, G01J 132

Patent

active

050536141

ABSTRACT:
An exposure apparatus includes a pulsed light source for repeatedly emitting a pulsed light; a photoelectric converting device for receiving at least a portion of the pulsed light from the pulsed light source; and a control device for controlling the emission of the pulsed light source, on the basis of a value related to a difference between a photoelectric signal produced from the photoelectric converting device at the time of emission of the pulsed light and an offset signal produced from the photoelectric converting device at the time of non-emission of the pulsed light.

REFERENCES:
patent: 4512657 (1985-04-01), Sakato
patent: 4711568 (1987-12-01), Torigoe et al.
patent: 4773750 (1988-09-01), Bruning

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