Exposure chuck comprising a surface of a lift bar having a...

Details Exposure chuck comprising a surface of a lift bar having a... Exposure chuck comprising a surface of a lift bar having a...

2011-04-19

2011-04-19

Healy, Brian M. (Department: 2883)

Liquid crystal cells, elements and systems

Nominal manufacturing methods or post manufacturing...

C349S158000

Reexamination Certificate

active

07929107

ABSTRACT:
An exposure chuck includes a lift bar to transfer a substrate; a lift bar mounting unit including the lift bar to move the substrate; and a substrate loading unit to load the substrate as the lift bar in the lift bar mounting unit transfers the substrate such that the substrate is separated from the lift bar, wherein a surface of the lift bar contacting the substrate has a concavo-convex structure.

REFERENCES:
patent: 7092231 (2006-08-01), Hoeks et al.
patent: 7230669 (2007-06-01), Tashiro et al.
patent: 2003/0171057 (2003-09-01), Lee et al.
patent: 2004/0001177 (2004-01-01), Byun et al.

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