Exposure arrangement for the production of masks

Details Exposure arrangement for the production of masks Exposure arrangement for the production of masks

1986-10-02

1989-09-19

Arnold, Bruce Y.

Electric lamp and discharge devices

With temperature modifier

For lead-in-seal or stem protection

350 12, 313477R, 358 67, 365217, G02B 2700, H04N 924

Patent

active

048675350

ABSTRACT:
An exposure arrangement for use in a computer-aided design system to produce masks. The arrangement includes a cathode-ray tube which produces an image of the mask on the screen of the tube, and an optical system which projects the image of the mask onto a substrate which is to be exposed. The cathode-ray tube is a high-brightness tube in which the screen is provided with a phosphor which emits in an ultraviolet spectrum and with a cooling circuit for the phosphor. The optical system is designed for use in the ultraviolet spectrum and operates on the ultraviolet image provided by the screen of the high-brightness tube.

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patent: 4678961 (1987-07-01), Comberg et al.
patent: 4686429 (1987-08-01), Fendley

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