Photocopying – Projection printing and copying cameras – Illumination systems or details
Patent
1995-10-10
1998-06-02
Grimley, Arthur T.
Photocopying
Projection printing and copying cameras
Illumination systems or details
250548, 355 53, 355 71, 355 77, 378 34, H01L 21027, G03B 2772
Patent
active
057608814
ABSTRACT:
An exposure apparatus, having an illumination optical system for radiating a light beam from a light source to a pattern area of a mask for transferring the image of the pattern area onto a photosensitive substrate by the light beam passing through the mask, is provided with plural sets of a first reference mark and a second reference mark arranged on the mask and the photosensitive substrate at positions corresponding to each other, and a light-shielding device for shielding the light beams radiated toward the second reference marks, whereby it is possible to re-use the second reference marks in a post-process by preventing the first reference marks on the mask from being superposed on the second reference marks on the photosensitive substrate or from being transferred onto a part near the second reference marks.
REFERENCES:
patent: 4613981 (1986-09-01), Siddall et al.
patent: 5150391 (1992-09-01), Ebinuma et al.
patent: 5161176 (1992-11-01), Ebinuma et al.
patent: 5317615 (1994-05-01), Ebinuma et al.
patent: 5473410 (1995-12-01), Nishi
patent: 5506684 (1996-04-01), Ota et al.
Miyazaki Seiji
Nara Kei
Narabe Tsuyoshi
Shirasu Hiroshi
Grimley Arthur T.
Kerner Herbert V.
Nikon Corporation
LandOfFree
Exposure apparatus with light shielding portion for plotosensiti does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Exposure apparatus with light shielding portion for plotosensiti, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Exposure apparatus with light shielding portion for plotosensiti will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1466658