Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Reexamination Certificate
2006-10-17
2006-10-17
Luu, Thanh X. (Department: 2878)
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
C385S116000
Reexamination Certificate
active
07122780
ABSTRACT:
An object of the present invention is to provide an exposure apparatus which is capable of obtaining high illumination efficiency and performing uniform exposure. In accordance with the exposure apparatus that includes a light source, an optical integrator to which light is supplied from the light source and a two-dimensional spatial light modulator illuminated by light which has transmitted the optical integrator, an optical fiber bundle end portion for emitting light to the optical integrator is provided in the light source, and the light-emitting area of the optical fiber bundle end portion is, as seen from the light-emitting side, substantially similar to the contour configuration of light-emitting surface of the optical integrator. Thus, most of the light emitted from the optical fiber bundle end portion can be illuminated onto a set illumination area. As a result, high illumination efficiency can be obtained and uniform exposure can be realized.
REFERENCES:
patent: 5098184 (1992-03-01), van den Brandt et al.
patent: 5949503 (1999-09-01), Koyama
patent: 2002/0196414 (2002-12-01), Manni
Fuji Photo Film Co. , Ltd.
Ko Tony
Luu Thanh X.
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