Exposure apparatus with detecting means insertable into an expos

Details Exposure apparatus with detecting means insertable into an expos Exposure apparatus with detecting means insertable into an expos

1983-11-16

1986-10-14

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

250557, G01N 2186

Patent

active

046174699

ABSTRACT:
An exposure apparatus for aligning an original, having at least one alignment mark thereon, and radiation sensitive member, having at least one alignment mark thereon and adapted to receive the image of the original, with each other includes a first detecting device including a sensor retractable from the optical path of a light for illuminating the original, the sensor being adapted to sense the original and radiation sensitive member to detect a relative displacement (degree of misalignment) between the original and radiation sensitive member when the sensor is in the optical path; a second detecting device including a sensor set out of the optical path and adapted to detect the position of one of the original and radiation sensitive member in the absolute coordinates of the apparatus; and a driving mechanism for moving one of the original and radiation sensitive member in response to the output of the second detecting device to correct the above mentioned displacement.

REFERENCES:
patent: 4052603 (1977-10-01), Karlson
patent: 4167677 (1979-09-01), Suzki
patent: 4251160 (1981-02-01), Bouwhuis et al.
patent: 4269505 (1981-05-01), Mayer
patent: 4362389 (1982-12-01), Koizumi
patent: 4492459 (1985-01-01), Omata

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