Exposure apparatus that compensates for spherical aberration of

Details Exposure apparatus that compensates for spherical aberration of Exposure apparatus that compensates for spherical aberration of

1994-05-13

1998-08-04

Allen, Stephone

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

250548, 356401, G01N 2186

Patent

active

057897344

ABSTRACT:
An exposure apparatus wherein an image forming system forms an image of a pattern upon a photosensitive layer, and a detecting system detects a spherical aberration of the image forming system. The detected spherical aberration of the image forming system is adjusted or controlled in a suitable way, whereby correct pattern transfer operation is assured.

REFERENCES:
patent: 4634240 (1987-01-01), Suzuki et al.
patent: 4688932 (1987-08-01), Suzuki
patent: 4711568 (1987-12-01), Torigoe et al.
patent: 4739373 (1988-04-01), Nishi et al.
patent: 4789222 (1988-12-01), Ota et al.
patent: 4801977 (1989-01-01), Ishizaka et al.
patent: 4853756 (1989-08-01), Matsuki
patent: 4875076 (1989-10-01), Torigoe et al.
patent: 4888614 (1989-12-01), Suzuki et al.
patent: 4894611 (1990-01-01), Shimoda et al.
patent: 4905041 (1990-02-01), Aketagawa
patent: 4908656 (1990-03-01), Suwa et al.
patent: 4965630 (1990-10-01), Kato et al.
patent: 4974736 (1990-12-01), Okunuki et al.
patent: 4988188 (1991-01-01), Ohta
patent: 5117254 (1992-05-01), Kawashima et al.
patent: 5286963 (1994-02-01), Torigoe
patent: 5305054 (1994-04-01), Suzuki et al.
patent: 5311362 (1994-05-01), Matsumoto et al.
patent: 5424552 (1995-06-01), Tsuji et al.
patent: 5448336 (1995-09-01), Shiraishi
Matsumoto, et al., "Issues and Method of Designing Lenses for Optical Lithography," Optical Engineering, vol. 13, No. 12, Dec. 1992, pp. 2657 through 2665.

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