Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1995-05-30
1998-03-17
Grimley, Arthur T.
Photocopying
Projection printing and copying cameras
Step and repeat
355 55, 355 67, 356399, 356400, 356401, H01L 2127, G03F 720, G03F 722
Patent
active
057293317
ABSTRACT:
There is disclosed an exposure apparatus for, while moving a first object and a second object in a certain moving direction, effecting projection exposure of an image of the first object onto the second object.
REFERENCES:
patent: 2742817 (1956-04-01), Altmau
patent: 3819265 (1974-06-01), Feldman et al.
patent: 3910684 (1975-10-01), Glatzel
patent: 4068947 (1978-01-01), Buckley et al.
patent: 4103989 (1978-08-01), Rosin
patent: 4391494 (1983-07-01), Hershel
patent: 4425037 (1984-01-01), Hershel et al.
patent: 4469414 (1984-09-01), Shafer
patent: 4512641 (1985-04-01), Mochizuki et al.
patent: 4814830 (1989-03-01), Isohata et al.
patent: 4844568 (1989-07-01), Suzuki et al.
patent: 4924257 (1990-05-01), Jain
patent: 5291240 (1994-03-01), Jain
patent: 5298939 (1994-03-01), Swanson et al.
patent: 5579147 (1996-11-01), Mori et al.
patent: 5602620 (1997-02-01), Miyazaki et al.
patent: 5614988 (1997-03-01), Kato et al.
patent: 5617181 (1997-04-01), Yanagihara et al.
patent: 5617211 (1997-04-01), Nara et al.
patent: 5623343 (1997-04-01), Nara et al.
patent: 5625436 (1997-04-01), Yanagihara et al.
Chiba Hiroshi
Kato Kinya
Kato Masaki
Kumazawa Masato
Shirasu Hiroshi
Grimley Arthur T.
Nikon Corporation
Virmani Shival
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