Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2006-08-08
2006-08-08
Fuller, Rodney (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S046000, C355S067000, C355S077000
Reexamination Certificate
active
07088425
ABSTRACT:
An exposure apparatus includes a plurality of projection optical systems and a substrate stage. Each of the plurality of projection optical systems forms an exposure field on the substrate. The substrate stage holds the substrate and moves in at least a scanning direction extending in a straight line. The plurality of exposure fields are arranged along a direction crossing the scanning direction. The plurality of projection optical systems and the substrate relatively move during an exposure field forming operation along the scanning direction.
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Kato Masaki
Tanaka Masashi
Fuller Rodney
Nikon Corporation
Oliff & Berridg,e PLC
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