Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2011-06-14
2011-06-14
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S072000
Reexamination Certificate
active
07961295
ABSTRACT:
The present invention provides an exposure apparatus including a projection optical system configured to project a reticle pattern onto a wafer, a selector configured to select a dummy wafer to be placed near an image plane of the projection optical system, from a plurality of dummy wafers having the same shape as that of the wafer and different reflectance with each other, a transfer unit configured to place the dummy wafer selected by the selector near the image plane of the projection optical system, and a controller configured to perform control such that dummy exposure is performed by irradiating the dummy wafer, which is placed near the image plane of the projection optical system by the transfer unit, with light via the projection optical system.
REFERENCES:
patent: 4506977 (1985-03-01), Sato
patent: 6163365 (2000-12-01), Takahashi
patent: 7586605 (2009-09-01), Fukuhara
patent: 2004/0183013 (2004-09-01), Nakasuji et al.
patent: 2007/0274711 (2007-11-01), Kaneyama et al.
patent: 2009/0153813 (2009-06-01), Shiraishi
patent: 63-016725 (1988-04-01), None
patent: 10-116766 (1998-05-01), None
Canon Kabushiki Kaisha
Canon U.S.A. Inc. IP Division
Nguyen Hung Henry
LandOfFree
Exposure apparatus, measurement method, stabilization... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Exposure apparatus, measurement method, stabilization..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Exposure apparatus, measurement method, stabilization... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-2632648