Exposure apparatus, maintenance method, exposure method, and...

Details Exposure apparatus, maintenance method, exposure method, and... Exposure apparatus, maintenance method, exposure method, and...

2007-03-12

2011-10-11

Nguyen, Hung Henry (Department: 2882)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S030000

Reexamination Certificate

active

08035800

ABSTRACT:
An exposure apparatus EX includes a liquid immersion system and an exchange system which performs exchange of the liquid immersion member. The exchange system has a holding device which holds the liquid immersion member detachably and a transport device. By using the exchange system, it is possible to suppress the lowering in the working rate due to the cleaning or exchange of the liquid immersion member.

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