Exposure apparatus, light source apparatus and device...

Details Exposure apparatus, light source apparatus and device... Exposure apparatus, light source apparatus and device...

2005-10-27

2008-12-02

Vanore, David A. (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S493100

Reexamination Certificate

active

07459707

ABSTRACT:
An exposure apparatus for exposing a pattern of a mask onto an object, said exposure apparatus includes a light source for generating a plasma, said light source including a condenser mirror that condenses a light irradiated from the plasma, an illumination optical system for illuminating the mask using the light condensed by the condenser mirror, a detector that is provided between the condenser mirror and the illumination optical system, said detector detecting a property of the light, and a changing part for changing a state of the plasma based on a detected result of the detector.

REFERENCES:
patent: 6324255 (2001-11-01), Kondo et al.
patent: 7348582 (2008-03-01), Hasegawa
patent: 62-283629 (1987-12-01), None
patent: 2000-56099 (2000-02-01), None

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