Exposure apparatus including an antivibration control system

Details Exposure apparatus including an antivibration control system Exposure apparatus including an antivibration control system

1995-03-15

1997-03-11

Grimley, Arthur T.

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

355 53, H01L 2130, G03B 2758

Patent

active

056106866

ABSTRACT:
An exposure apparatus includes an exposure optical system, a stage on which an article to be exposed is to be placed, a moving mechanism for moving the stage relative to the exposure optical system, a first base for supporting the moving mechanism, a main base for supporting the exposure optical system, on which main base the first base is mounted, a first supporting portion being interposed between the first base and the main base, a second base for supporting the main base, a vibration removing device being interposed between the main base and the second base, and a second supporting portion being interposed between the first base and the second base.

REFERENCES:
patent: 4473292 (1984-09-01), Mayer
patent: 5040431 (1991-08-01), Sakino et al.
patent: 5155523 (1992-10-01), Hara et al.
patent: 5172160 (1992-12-01), Van Eijk et al.
patent: 5187519 (1993-02-01), Takabayashi et al.
patent: 5280677 (1994-01-01), Kubo et al.
patent: 5376988 (1994-12-01), Osanai
patent: 5446519 (1995-08-01), Makinouchi

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