Exposure apparatus including a read circuit for reading...

Details Exposure apparatus including a read circuit for reading... Exposure apparatus including a read circuit for reading...

2006-04-11

2006-04-11

Pham, Hai (Department: 2861)

Incremental printing of symbolic information

Light or beam marking apparatus or processes

Scan of light

C347S246000

Reexamination Certificate

active

07027079

ABSTRACT:
An exposure apparatus reads an electrical signal from a photoelectric sensor by using the time interval between emission pulses even at a high emission frequency of the light source. A photoelectric sensor attached to an exposure apparatus which exposes a substrate to a pulse beam emitted by a light source for generating a pulse beam has a plurality of photoelectric converters. The photoelectric converters are divided into a plurality of blocks. While charges are read from each block by using one time interval between pulse beams, charges in all the photoelectric converters are read by using a plurality of time intervals between pulse beams.

REFERENCES:
patent: 4584607 (1986-04-01), Miyazawa
patent: 4804978 (1989-02-01), Tracy
patent: 5650643 (1997-07-01), Konuma
patent: 6424405 (2002-07-01), Kurosawa et al.
patent: 1-274020 (1989-01-01), None
patent: 2-5063 (1990-01-01), None

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