Exposure apparatus having separately supported first and...

Details Exposure apparatus having separately supported first and... Exposure apparatus having separately supported first and...

2007-02-27

2007-02-27

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Illumination systems or details

C355S053000, C355S075000

Reexamination Certificate

active

11108716

ABSTRACT:
Excellent exposure performance is achieved by disposing a shade system in the vicinity of a mask. An exposure apparatus exposes a mask mounted on a first table using an illumination apparatus. The illumination apparatus illuminates the mask with light from a light source. The first table is provided with a shade system including shades formed of a material absorbing EUV light. The shade system obstructs unnecessary light that does not contribute to the exposure.

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