Exposure apparatus having mount means to suppress vibrations

Details Exposure apparatus having mount means to suppress vibrations Exposure apparatus having mount means to suppress vibrations

1991-10-04

1993-02-16

Wintercorn, Richard A.

Photocopying

Projection printing and copying cameras

Step and repeat

G03B 2742

Patent

active

051875195

ABSTRACT:
An exposure apparatus for exposing a substrate with light from a light source has a stage for moving the substrate along a substantially horizontal plane, a base member for supporting the stage, and a frame member having at least three mounts for supporting the base member. A first actuator system having a plurality of first actuators provided in the mounts, respectively, moves the base member in a direction substantially parallel to the vertical direction. A second actuator system having at least one second actuator provided in at least one of the mounts moves the base member substantially along the horizontal plane. A control means is provided to control the first and second actuator systems in a such a way as to suppress vibration of the base member.

REFERENCES:
patent: 4473292 (1984-09-01), Mayer
patent: 4595282 (1986-06-01), Takabayashi
patent: 4676630 (1987-06-01), Matsushita et al.
patent: 4748477 (1988-05-01), Isohata et al.
patent: 4803712 (1989-02-01), Kembo et al.
patent: 4956789 (1990-09-01), Hamada et al.

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