Exposure apparatus for a ball shaped substrate

Details Exposure apparatus for a ball shaped substrate Exposure apparatus for a ball shaped substrate

1998-10-16

2000-10-10

Lee, Eddie C.

Photocopying

Projection printing and copying cameras

Image transferred to or from curved surface

355 48, 355 49, 355 43, G03B 2758, G03B 2748, G03B 2752

Patent

active

061307424

ABSTRACT:
An exposure apparatus for a ball shaped substrate for manufacturing semiconductor devices. An exposure apparatus continually exposes light through a mask having a specified pattern to a surface of a ball shaped substrate. Holders each holding a ball shaped substrate are attached to an annular member that rotates continuously. Optics equipment guide the light from a light source to a surface of the substrate through a mask having a specified pattern. At the same time, optics equipment scans the light emission end to maintain the location relationship of the substrate with the annular member. The substrate is exposed while moving continuously.

REFERENCES:
patent: 3582176 (1971-06-01), Mathisen
patent: 3998659 (1976-12-01), Wakefield
patent: 4087177 (1978-05-01), Gumm et al.
patent: 4225375 (1980-09-01), Aidlin et al.
patent: 5461455 (1995-10-01), Coteus et al.
patent: 5686230 (1997-11-01), Nellissen
patent: 5870177 (1999-02-01), Yoshikawa
patent: 5877943 (1999-03-01), Ramamurthi

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