Exposure apparatus, focal point detecting method, exposure...

Details Exposure apparatus, focal point detecting method, exposure... Exposure apparatus, focal point detecting method, exposure...

2008-01-01

2008-01-01

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S055000, C355S072000, C356S400000, C356S620000

Reexamination Certificate

active

07315348

ABSTRACT:
An exposure apparatus includes an original stage arranged to hold a reflective original having a pattern, a substrate stage arranged to hold a substrate, an illumination optical system arranged to emit exposure light along a first direction inclined from a direction of a reflection surface of the reflective original, a projection optical system arranged to project the pattern onto the substrate along a second direction using the exposure light reflected by the reflection surface of the reflective original, an original reference member arranged on the original stage or the reflective original, a substrate reference member, having a substrate mark, arranged on the substrate stage or the substrate, and a detector arranged to detect light from the substrate mark of the substrate reference number, which is illuminated with light.

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