Exposure apparatus, exposure method, recording and/or...

Details Exposure apparatus, exposure method, recording and/or... Exposure apparatus, exposure method, recording and/or...

2006-08-29

2006-08-29

Tran, Thang V. (Department: 2627)

Dynamic information storage or retrieval

Specific detail of information handling portion of system

Radiation beam modification of or by storage medium

C369S044230

Reexamination Certificate

active

07099259

ABSTRACT:
An exposure apparatus has an exposure laser light source, a detection laser light source, a converging lens assembly, detector and a controller. The exposure laser light source emits an exposure laser beam. The detection laser light source emits a detection laser beam. The converging lens assembly receives the exposure laser beam and the detection laser beam, and is disposed in a near-field region of the exposure surface of a negative. The detector detects a linearly polarized component of a detection laser beam reflected off the distal end surface of the converging lens assembly. The controller controls the distance between the distal end surface of the converging lens assembly and the exposure surface on the basis of a detection signal from the detector.

REFERENCES:
patent: 6115347 (2000-09-01), Ichimura et al.
patent: 6667809 (2003-12-01), Hill
patent: 6717896 (2004-04-01), Imanishi
patent: 6721259 (2004-04-01), Yamamoto et al.
patent: 6738323 (2004-05-01), Imanishi et al.
patent: 6754161 (2004-06-01), Masuhara et al.
patent: 2004/0013077 (2004-01-01), Saito et al.

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