Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2004-12-03
2011-11-08
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S030000
Reexamination Certificate
active
08054447
ABSTRACT:
An exposure apparatus (EX) is an apparatus which exposes a substrate (P) by irradiating exposure light (EL) onto the substrate (P) via a projection optical system (PL) and a liquid (1). The exposure apparatus (EX) has a substrate table (PT) for holding the substrate (P), and a plate member (30) having a liquid repellent flat surface (30A) is replaceably provided to the substrate table (PT) to prevent the liquid from remaining, maintaining excellent exposure accuracy.
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Hirukawa Shigeru
Hoshika Ryuichi
Ishizawa Hitoshi
Nagasaka Hiroyuki
Takaiwa Hiroaki
Nguyen Hung Henry
Nikon Corporation
Oliff & Berridg,e PLC
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