Exposure apparatus, exposure method, and producing method of...

Details Exposure apparatus, exposure method, and producing method of... Exposure apparatus, exposure method, and producing method of...

2011-01-04

2011-01-04

Kim, Peter B (Department: 2882)

Photocopying

Projection printing and copying cameras

Step and repeat

Reexamination Certificate

active

07864293

ABSTRACT:
An exposure apparatus for exposure-transferring an image of a pattern projected through an optical system having a plurality of optical units L1to L13onto an object P, comprises a correcting device which corrects a position of at least one of a plurality of images to be projected onto the object P by the plurality of optical units L1to L13so that displacements of the optical units L1to L13are compensated.

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