Radiant energy – Invisible radiant energy responsive electric signalling – Semiconductor system
Reexamination Certificate
2007-08-31
2011-10-18
Porta, David (Department: 2884)
Radiant energy
Invisible radiant energy responsive electric signalling
Semiconductor system
C250S492100, C250S492200, C355S030000, C355S053000, C355S072000, C355S055000
Reexamination Certificate
active
08039807
ABSTRACT:
A part of exposure beam through a liquid (LQ) via a projection optical system (PL) enters a light-transmitting section (44), enters an optical member (41) without passing through gas, and is focused. The exposure apparatus receives the exposure light from the projection optical system to perform various measurements even if the numerical aperture of the projection optical system increases.
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Green Yara B
Nikon Corporation
Oliff & Berridg,e PLC
Porta David
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