Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2005-12-09
2011-10-11
Kim, Peter B (Department: 2882)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S030000
Reexamination Certificate
active
08035799
ABSTRACT:
An exposure apparatus is provided with a measuring unit which measures at least one of property and components of a liquid in a state that a liquid immersion area is formed on an object different from a substrate P to be exposed. There is provided an exposure apparatus which can accurately perform exposure process and measurement process through the liquid by judging the state of the liquid in advance and by performing a procedure as appropriate.
REFERENCES:
patent: 4346164 (1982-08-01), Tabarelli et al.
patent: 4480910 (1984-11-01), Takanashi et al.
patent: RE32795 (1988-12-01), Matsuura et al.
patent: 5493403 (1996-02-01), Nishi
patent: 5528118 (1996-06-01), Lee
patent: 5610683 (1997-03-01), Takahashi
patent: 5623853 (1997-04-01), Novak et al.
patent: 5646413 (1997-07-01), Nishi
patent: 5696441 (1997-12-01), Mak et al.
patent: 5715039 (1998-02-01), Fukuda et al.
patent: 5825043 (1998-10-01), Suwa
patent: 5874820 (1999-02-01), Lee
patent: 6195154 (2001-02-01), Imai
patent: 6208407 (2001-03-01), Loopstra
patent: 6341007 (2002-01-01), Nishi et al.
patent: 6400441 (2002-06-01), Nishi et al.
patent: 6549269 (2003-04-01), Nishi et al.
patent: 6590634 (2003-07-01), Nishi et al.
patent: 6721039 (2004-04-01), Ozawa
patent: 6778257 (2004-08-01), Bleeker et al.
patent: 7317504 (2008-01-01), De Smit et al.
patent: 7505111 (2009-03-01), Hirukawa et al.
patent: 2002/0041377 (2002-04-01), Hagiwara et al.
patent: 2002/0061469 (2002-05-01), Tanaka
patent: 2004/0165159 (2004-08-01), Lof et al.
patent: 2004/0207824 (2004-10-01), Lof et al.
patent: 2004/0238005 (2004-12-01), Takayama
patent: 2005/0074704 (2005-04-01), Endo et al.
patent: 2005/0078286 (2005-04-01), Dierichs et al.
patent: 2005/0179877 (2005-08-01), Mulkens et al.
patent: 2005/0219490 (2005-10-01), Owa
patent: 2005/0225734 (2005-10-01), De Smit et al.
patent: 2005/0264774 (2005-12-01), Mizutani et al.
patent: 2006/0126043 (2006-06-01), Mizutani et al.
patent: 2006/0231206 (2006-10-01), Nagasaka et al.
patent: 2007/0009841 (2007-01-01), Endo et al.
patent: 2007/0242247 (2007-10-01), Shiraishi
patent: 2007/0291239 (2007-12-01), Shiraishi
patent: 2008/0212043 (2008-09-01), Nagasaka
patent: 2008/0239260 (2008-10-01), Shiraishi
patent: 221 563 (1985-04-01), None
patent: 224 448 (1985-07-01), None
patent: 1 041 357 (2000-10-01), None
patent: 1 420 298 (2004-05-01), None
patent: 1 482 372 (2004-12-01), None
patent: 1 486 827 (2004-12-01), None
patent: 1 510 872 (2005-03-01), None
patent: 1 522 894 (2005-04-01), None
patent: 1 571 699 (2005-09-01), None
patent: 1 571 701 (2005-09-01), None
patent: 1 628 330 (2006-02-01), None
patent: 1 783 821 (2007-05-01), None
patent: 1 808 884 (2007-07-01), None
patent: A 57-117238 (1982-07-01), None
patent: A 58-202448 (1983-11-01), None
patent: A 59-19912 (1984-02-01), None
patent: A 62-65326 (1987-03-01), None
patent: A 63-157419 (1988-06-01), None
patent: A 4-65603 (1992-03-01), None
patent: A 4-305915 (1992-10-01), None
patent: A 4-305917 (1992-10-01), None
patent: A 5-62877 (1993-03-01), None
patent: A 6-124873 (1994-05-01), None
patent: A 07-176468 (1995-07-01), None
patent: A 7-220990 (1995-08-01), None
patent: A-8-37149 (1996-02-01), None
patent: A-8-166475 (1996-06-01), None
patent: A 8-316125 (1996-11-01), None
patent: A-8-330224 (1996-12-01), None
patent: A-10-163099 (1998-06-01), None
patent: A-10-214783 (1998-08-01), None
patent: A 10-303114 (1998-11-01), None
patent: A 10-340846 (1998-12-01), None
patent: A 11-16816 (1999-01-01), None
patent: A 11-135400 (1999-05-01), None
patent: A 11-176727 (1999-07-01), None
patent: A 2000-58436 (2000-02-01), None
patent: A-2000-505958 (2000-05-01), None
patent: A 2001-267239 (2001-09-01), None
patent: A 2002-14005 (2002-01-01), None
patent: A-2005-79222 (2005-03-01), None
patent: A-2005-79584 (2005-03-01), None
patent: A-2005-136404 (2005-05-01), None
patent: A-2005-183693 (2005-07-01), None
patent: A 2005-209705 (2005-08-01), None
patent: A-2006-190997 (2006-07-01), None
patent: WO 99/49504 (1999-09-01), None
patent: WO 01/35168 (2001-05-01), None
patent: WO 2004/019128 (2004-03-01), None
patent: WO 2004/053950 (2004-06-01), None
patent: WO 2004/053958 (2004-06-01), None
patent: WO 2004/055803 (2004-07-01), None
patent: WO 2004/057589 (2004-07-01), None
patent: WO 2004/057590 (2004-07-01), None
patent: WO 2004/090577 (2004-10-01), None
patent: WO 2004/105107 (2004-12-01), None
patent: WO 2004/107417 (2004-12-01), None
patent: WO 2005/022615 (2005-03-01), None
patent: WO 2005/029559 (2005-03-01), None
patent: WO 2005/062065 (2005-07-01), None
patent: WO 2006/029824 (2006-03-01), None
Chinese Patent Office, Chinese Office Action for Chinese Patent Application No. 1005800355949 (with partial English translation), dated May 9, 2008, pp. 1-4 (pp. 1-2 for partial translation).
International Search Report for PCT/JP2005/022634 (with English translation), dated Mar. 20, 2006, pp. 1-2.
Supplementary Extended European Search Report completed Jan. 31, 2011 mailed Feb. 4, 2011 in European Application No. 05 81 4747.1.
Written Opinion mailed Sep. 20, 2005 in International Application No. PCT/JP2005/010412 (with translation).
International Search Report mailed Sep. 20, 2005 in International Application No. PCT/JP2005/010412 (with translation).
Supplementary European Search Report completed Jun. 2, 2009 in European Application No. EP 05 74 9073.2.
Foreign Office Action dated Jul. 4, 2008 issued in Chinese Application No. 2005800183590 (with translation).
Foreign Office Action dated Jul. 10, 2009 issued in Chinese Application No. 2005800183590 (with translation).
Foreign Office Action mailed Dec. 14, 2010 in Japanese Application No. 2006-514514 (with translation).
Office Action mailed Apr. 1, 2008 in U.S. Appl. No. 11/570,219.
Office Action mailed Nov. 17, 2008 in U.S. Appl. No. 11/570,219.
Office Action mailed Jun. 24, 2009 in U.S. Appl. No. 11/570,219.
Office Action mailed Mar. 3, 2010 in U.S. Appl. No. 11/570,219.
Office Action mailed Nov. 4, 2010 in U.S. Appl. No. 11/570,219.
Foreign Office Action mailed Aug. 3, 2010 in Japanese Application No. 2006-514514 (with translation).
Kim Peter B
Nikon Corporation
Oliff & Berridg,e PLC
LandOfFree
Exposure apparatus, exposure method, and device producing... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Exposure apparatus, exposure method, and device producing..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Exposure apparatus, exposure method, and device producing... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-4272296