Photocopying – Projection printing and copying cameras – Focus or magnification control
Reexamination Certificate
2011-04-26
2011-04-26
Kastler, Scott (Department: 1793)
Photocopying
Projection printing and copying cameras
Focus or magnification control
C355S072000
Reexamination Certificate
active
07932996
ABSTRACT:
An exposure apparatus forms an immersion area by supplying a liquid onto a part of a substrate, and forms a prescribed pattern on the substrate through the liquid. A spare immersion area, which is capable of holding part of the liquid on the substrate, is formed at the outer circumference of the immersion area. It is possible to prevent the separation of the liquid, which is disposed between a lower surface of a projection optical system and a substrate surface, from the lower surface of the projection optical system in accordance with the relative movement of the projection optical system and the substrate.
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Imai Motokatsu
Makinouchi Susumu
Kastler Scott
Nikon Corporation
Oliff & Berridg,e PLC
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