Photocopying – Projection printing and copying cameras – Detailed holder for photosensitive paper
Reexamination Certificate
2001-12-20
2004-09-14
Fuller, Rodney (Department: 2851)
Photocopying
Projection printing and copying cameras
Detailed holder for photosensitive paper
C355S053000, C355S075000, C355S077000
Reexamination Certificate
active
06791670
ABSTRACT:
FIELD OF THE INVENTION
The present invention relates to an exposure apparatus used in a semiconductor manufacturing process or the like, particularly, to a projection exposure apparatus for projecting and transferring the pattern of a reticle as a master onto a silicon wafer as a substrate and, more particularly, to an exposure apparatus having a linear motor for driving reticle and wafer stages for sequentially moving the reticle and silicon wafer with respect to a projection exposure system when projecting a reticle pattern onto the wafer.
The present invention relates to an exposure apparatus having a linear motor for transmitting the reaction forces of reticle and wafer stages, or a damping linear motor on the mount of a main body structure, which supports each stage and a projection optical system.
The present invention relates to a semiconductor device manufacturing method using the exposure apparatus noted above, and a maintenance method for the exposure apparatus.
BACKGROUND OF THE INVENTION
A conventional linear motor will be described with reference to
FIGS. 19A
,
19
B, and
20
to
22
.
FIGS. 19A and 19B
are schematic views showing a conventional linear motor. In
FIGS. 19A and 19B
, a plurality of coils
116
are aligned within an effective stroke in the driving direction of an X linear motor
109
, and the lead line of each coil
116
is connected to a connector
118
. A fine moving stage
107
incorporates movable magnets
119
with respect to the coils
116
serving as linear motor stationary members. By flowing a driving current through the coils
116
, the fine moving stage
107
is moved in a moving direction (±X direction), indicated by the arrow by the movable magnets
119
magnetized as shown in
FIG. 19B
, by a Lorentz force.
The coil
116
conventionally uses a round wire coil
116
a
with a round section, as shown in FIG.
20
. The core of the round wire coil
116
a
is made of a copper wire
116
b
, and the outer surface is coated with an insulating layer
116
c
made of polyimide or polyurethane.
The wound state of the round wire coil
116
a
is shown in
FIG. 21
, which is an enlarged view of a portion H shown in FIG.
19
B. The coil
116
is obtained by winding the round wire coil
116
a
around a hollow coil into a sectional shape as shown in FIG.
21
. As shown in
FIG. 22
, which is an enlarged view of a portion
1
, the round wire coil
116
a
is continuously wound in alignment to form the coil
116
, and the coil
116
constitutes the X linear motor
109
.
The coil
116
wound with the conventional round wire coil
116
a
adopts the multilayered structure of the round wire, so a large gap is formed between adjacent round wire layers. The space factor of the copper wire
116
b
with respect to a coil section of aligned winding can only be increased to around 75%, failing to increase the current density of a driving current supplied to the coil.
As a result, the linear motor efficiency by the stationary coil and movable magnet cannot be increased for a constant volume, and the stage apparatus cannot attain higher speed and lower power consumption.
SUMMARY OF THE INVENTION
The present invention has been proposed to solve the conventional problems, and has as its object to decrease a gap in a conventional round wire coil to increase the space factor of a copper wire with respect to the coil section, thereby increasing the current density of a driving current supplied to the coil, increasing the linear motor efficiency by a stationary coil and a movable magnet for a constant volume, and ultimately, realizing higher speed and lower power consumption of a stage apparatus.
According to the present invention, the foregoing object is attained by providing an exposure apparatus for exposing a substrate to a pattern drawn on a master surface, comprising a driving unit for moving master and substrate stages or a linear motor for generating control power for cutting off transmission of a reaction force and/or an external vibration to the exposure apparatus in driving the stages, wherein the linear motor has a coil formed by winding a foil-like conductor having an insulating layer in a multilayered structure.
The present invention having this arrangement adopts a coil formed by winding in a multilayered structure a film-like member (to be referred to as a foil coil hereinafter) made of foil-like conductor having an insulating layer. This coil can easily increase the space factor of the conductor with respect to the coil section and implement a high-efficiency linear motor.
According to the present invention, the foregoing object is attained by providing an exposure apparatus for exposing a substrate to a pattern drawn on a master surface, comprising a driving unit for moving master and substrate stages or a linear motor for generating control power for cutting off transmission of a reaction force and/or an external vibration to the exposure apparatus in driving the stages, wherein the linear motor has a coil formed by winding a foil-like conductor in a multilayered structure via an insulating layer, and a lead line for connecting an inner or outer end of the coil to an external electrode.
At least part of the lead line is made of the foil-like conductor, which constitutes the coil. This can prevent deformation of the side surface of the coil caused by a copper wire or the like. Substantially a space corresponding to the coil thickness allows attaching the coil. This coil is constituted by winding the foil-like conductor in a multilayered structure, so that the two ends of the coil are positioned on the inner and outer circumferential surfaces. A lead line connected to the inner end is generally extracted in the outer circumferential direction of the coil. Electrical insulation between the lead line and the side surface of the coil main body can be compensated for by using an insulator for insulting the coil main body from the lead line extracted from the inner end.
According to the present invention, the foregoing object is attained by providing an exposure apparatus for exposing a substrate to a pattern drawn on a master surface, comprising a driving unit for moving master and substrate stages or a linear motor for generating control power for cutting off transmission of a reaction force and/or an external to the exposure apparatus in driving stages, wherein the linear motor has a coil formed by winding a foil-like conductor in a multilayered structure via an insulating layer, and a relay substrate for connecting an inner or outer end of the coil to an external electrode.
The relay substrate is disposed at a predetermined portion in the inner or outer circumferential surface direction of the coil or in the side surface direction in contact with the edges of the inner and outer circumferential surfaces. The relay substrate is connected to a connection terminal between the relay substrate and an external electrode and a lead line extending from an inner or outer end, and relays them. The relay substrate is, e.g., a substrate bearing another conductor wire or conductor pattern, or a flexible substrate. The use of the relay substrate can prevent disconnection or a short circuit caused by the tangle of a lead line, a cooling solution, or the like, and can implement a compact, and simple, linear motor even when many lead lines are laid out inside a linear motor constituted by aligning a plurality of coils. Accordingly, the linear motor can be easily manufactured, attached, and maintained in an exposure apparatus limited in the installation space for members. Cost reduction can also be expected in the manufacture and operation of the apparatus.
According to the present invention, the foregoing object is attained by providing an exposure apparatus for exposing a substrate to a pattern drawn on a master surface, comprising a driving unit for moving master and substrate stages or a linear motor for generating control power for cutting off transmission of a reaction force and/or an external vibration to the exposure apparatus in driving the stages, wherein t
Emoto Keiji
Miyajima Yoshikazu
Outuka Kazuhito
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Fuller Rodney
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