Exposure apparatus correcting illuminance distribution

Photocopying – Projection printing and copying cameras – Illumination systems or details

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Details

355 53, 359209, 359211, G03B 2742, G03B 2754

Patent

active

057988242

ABSTRACT:
The present invention relates to an illumination optical apparatus capable of correcting unevenness of an illuminance distribution on an illuminated surface, particularly slant unevenness thereof. The illumination optical apparatus comprises a light source unit for supplying a nearly parallel beam, a multi-light-source forming system for forming a plurality of light source images, based on the light beam from the light source unit, a condenser optical system for condensing the light from the multi-light-source forming system to illuminate a surface of an object in a superimposed manner, and a deflecting device for changing an angle of incidence of the light into the multi-light-source forming system, disposed in an optical path between the light source unit and the multi-light-source forming system.

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patent: 5459547 (1995-10-01), Shiozawa
patent: 5621499 (1997-04-01), Shiozawa

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