Exposure apparatus, control method for the same, and device...

Details Exposure apparatus, control method for the same, and device... Exposure apparatus, control method for the same, and device...

2007-11-30

2008-12-23

Nguyen, Hung Henry (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for original

C355S072000, C310S012060

Reexamination Certificate

active

07468783

ABSTRACT:
An exposure apparatus which can change a reticle efficiently with a simple arrangement is provided. When changing the reticle, a table is moved to a predetermined change operation position. At this time, a second magnet is retreated to a position where a repulsion force generated by a first magnet and the second magnet does not act on the table. After the reticle is changed, the second magnet is restored to a position where a repulsion force generating unit exerts a repulsion force upon the table.

REFERENCES:
patent: 7126666 (2006-10-01), De Weerdt et al.
patent: 7126674 (2006-10-01), Butler
patent: 7259836 (2007-08-01), Ohishi
patent: 7288859 (2007-10-01), Hazelton
patent: 2004-079639 (2004-03-01), None

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