Photocopying – Projection printing and copying cameras – Illumination systems or details
Reexamination Certificate
2011-08-23
2011-08-23
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
Illumination systems or details
C355S030000, C355S053000, C355S077000, C359S359000
Reexamination Certificate
active
08004657
ABSTRACT:
An exposure apparatus that includes a chamber in which an optical element, including a capping layer, is arranged, and that exposes a substrate to exposure light via the optical element. The apparatus includes a supply unit configured to supply a material into the chamber and a providing unit configured to provide electromagnetic waves to the capping layer. The apparatus is configured so that the electromagnetic waves provided by the providing unit cause a photochemical reaction of the material, to grow a layer on the capping layer, with at least one of a condition of supply of the material by the supply unit and a condition of provision of the electromagnetic waves by the providing unit being changed in accordance with each position of the capping layer, based on information of a decrease in an amount of the capping layer at each position, so as to repair the capping layer.
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Kanehira Mika
Tanabe Masayuki
Terashima Shigeru
Watanabe Yutaka
Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Kreutzer Colin
Nguyen Hung Henry
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