Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2008-05-27
2008-05-27
Lee, Diane I. (Department: 2851)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S071000
Reexamination Certificate
active
07379151
ABSTRACT:
An exposure apparatus for exposing a pattern of a mask onto a plate to be exposed, the exposure apparatus includes a cleaning apparatus for cleaning the mask. The cleaning apparatus includes an irradiating part for irradiating a laser beam to the mask, and a polarization controller for controlling a polarization characteristic of the laser beam according to a longitudinal direction of the pattern.
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Ohkubo Akinori
Osawa Hiroshi
Yamazoe Kenji
Canon Kabushiki Kaisha
Lee Diane I.
Liu Chia-how Michael
Morgan & Finnegan L.L.P.
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