Exposure apparatus and purging method for the same

Details Exposure apparatus and purging method for the same Exposure apparatus and purging method for the same

2005-07-05

2005-07-05

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S067000, C355S077000

Reexamination Certificate

active

06914667

ABSTRACT:
Disclosed is an exposure apparatus including an exposure light source, an optical system, a casing, a gas replacing system, and a control system. The optical system directs exposure light from the exposure light source to a photosensitive substrate. The casing accommodates therein at least one optical element of the optical system. The gas replacing system supplies a purge gas into the casing to replace a gas inside the casing with the purge gas. The control system controls the gas replacing system so as to increase a flow rate of the purge gas if a predetermined time elapses after an exposure is completed and before a next exposure starts.

REFERENCES:
patent: 2002/0000519 (2002-01-01), Tsukamoto
patent: 2002/0057422 (2002-05-01), Arakawa
patent: 2-210813 (1990-08-01), None
patent: 6-216000 (1994-08-01), None

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