Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2004-03-01
2008-12-30
Kim, Peter B (Department: 2851)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S072000
Reexamination Certificate
active
07471372
ABSTRACT:
An exposure apparatus which transfers a pattern image formed on a mask on to a substrate through a projection optical system, comprising a substrate table which holds said substrate, a first sensor which measures a gap between said substrate surface held by said substrate table and a control target position, and a second sensor which measures a distance between said projection optical system and said substrate table in an optical axis direction and corrects the control target position of said first sensor.
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Kim Peter B
Nikon Corporation
Oliff & Berridg,e PLC
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