Photocopying – Projection printing and copying cameras – Step and repeat
Patent
1997-06-23
2000-08-01
Braun, Fred L.
Photocopying
Projection printing and copying cameras
Step and repeat
356400, 356401, G03B 2742, G01B 1100
Patent
active
060974737
ABSTRACT:
An exposure apparatus exposes a pattern formed on a mask to a substrate having an alignment with a difference in level and a photosensitive material applied on the surface of the substrate. The exposure apparatus includes a stage adapted to hold the substrate and two-dimensionally movable in a predetermined plane; a sensor held in a predetermined relationship with respect to the plane and outputting a signal which varies in response to a relative movement between the sensor and the substrate in a direction perpendicular to the plane; a position detecting device for detecting the position of the stage; an arithmatic unit for calculating the position of the alignment mark on the basis of information from the position detecting device and an output outputted from the sensor when the stage and the sensor are moved relative to each other; and a control system for controling movement of the stage on the basis of the position of the alignment mark. A method is also provided for positioning of and measurement of alignment marks formed on a substrate.
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Nakayama Shigeru
Ota Kazuya
Braun Fred L.
Nikon Corporation
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