Exposure apparatus and original

Details Exposure apparatus and original Exposure apparatus and original

2011-03-22

2011-03-22

Kim, Peter B (Department: 2882)

Photocopying

Projection printing and copying cameras

Detailed holder for original

Reexamination Certificate

active

07911588

ABSTRACT:
An exposure apparatus configured to expose a pattern of an original onto a substrate includes a wire electrode row that includes plural parallel wire electrodes, and that is opposed to the original, and a power source that applies an AC voltage to the plural wire electrodes, wherein the wire electrode row includes a first electrode group, and a second wire electrode group to which an AC voltage having a phase different from that of an AC voltage applied to the first electrode group is applied.

REFERENCES:
patent: 6781673 (2004-08-01), Moors et al.
patent: 2005/0040345 (2005-02-01), Bakker et al.
patent: 08-124822 (1996-05-01), None
patent: 2002-124463 (2002-04-01), None
patent: 2005-043895 (2005-02-01), None
patent: 2006-120774 (2006-05-01), None
patent: 2006-120776 (2006-05-01), None
patent: 2007-329288 (2007-12-01), None
Masuda, et al., IEEE translation from Trans. IEE Japan., pp. 9-18, vol. 92B, No. 1, 1972.

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