Exposure apparatus and microdevice manufacturing method using th

Details Exposure apparatus and microdevice manufacturing method using th Exposure apparatus and microdevice manufacturing method using th

1994-06-24

1996-02-13

Gellner, Michael L.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, 347246, G01D 942, G03B 2772

Patent

active

054915341

ABSTRACT:
An exposure apparatus for exposing a substrate with pulses of light supplied sequentially, is disclosed. The apparatus includes a detector for detecting the light quantity of each pulse, and a controller for controlling the timing of exposure of the substrate with a pulse to be emitted, on the basis of the light quantity provided by at least one pulse preceding the pulse to be emitted.

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